Almere, the Netherlands – February 21, 2023
Levitech announces that the atomic layer deposition (ALD) tool, the Levitrack® system, is qualified for mass production of perovskite tandem cells. The multi-stack atomic layer is used as a buffer layer in the tandem cell to improve the perovskite stability and cell efficiency.
“Our customer uses a stack of atomic deposition layers for their advanced tandem solar cell. Mass production is ready to take off, with a single pass, the system can deposit different atomic layers on top of each other”, commented Mark Steltenpool, manager of the Levitrack product line. “Our long-term strategy of providing production solutions to enable fast (spatial) ALD deposition of not only Aluminum Oxide but also other ALD layers, delivering the right product for meeting our customers’ mass production needs.”
The Levitrack system consists of a series of process modules, which are individually switchable to deposit the required layer thickness or multi-layer stack. Depending on the configuration of the integrated gas supply system and liquid precursors, various types of metal-oxides can be deposited (e.g. Al2O3, TiO2, SnO2, ZnO) down to temperatures as low as 100°C. The system has been upgraded to process wafers up to M6 size.
About Levitech
Levitech is a global player in semiconductor production solutions for the IC and solar industries. As a spin-off of ASM International, Levitech was established in 2009. Recently the LEVO 6000 series was introduced based on the revolutionary patented floating wafer technology used in the semiconductor industry for Rapid Thermal Processing (RTP).
The Levitrack™ ALD system is a state-of-the-art production solution for the solar industry and uses atomic layer deposition (ALD) for passivation layers in the solar cells.
For more information, visit Levitech’s web site at www.levitech.nl.
Contact
Geert Eveleens| Investor Relations | info@levitech.nl | +31 36 538 7679
