LEVITRACK

The Levitrack Atomic Layer Deposition (ALD) system is designed for high-volume production, depositing ultra-thin layers to improve solar cell efficiency. It generates passivation and intermediate multi-stack layers, which are applied in the tandem cell of a standard cell with a perovskite cell on top.

In the Levitrack system, wafer substrates float on a thin gas layer inside the process chamber, allowing for conductive heating. Once the process temperature is reached, the substrates levitate effortlessly through a series of ALD deposition cells, free from contact or external force. The wafer is then quickly cooled through conductive cooling. Recent advancements have enabled multi-layer ALD for continuous mass production of tandem solar cells.